Ders Adı Parlak Deşarj Süreçleri 517
Semester Güz
Ders Tipi Zorunlu
Teori 3
Kredi 3
ECTS 10
Dersin Açıklaması
Brief resume of the basics of gas dynamics, basics of gas discharges with focus on low pressure case, overview of processing equipment, vacuum systems, discharge excitation, gas supply and exhaust structures, coating, etching, modification, nano-deposition processes, in-situ process analyses, film properties and structural analysis.