Course Name Glow Discharge Processing 517
Semester Güz
Course Type Compulsory
Theory 3
Credit 3
ECTS 10
Course Description
Brief resume of the basics of gas dynamics, basics of gas discharges with focus on low pressure case, overview of processing equipment, vacuum systems, discharge excitation, gas supply and exhaust structures, coating, etching, modification, nano-deposition processes, in-situ process analyses, film properties and structural analysis.