Elective List

Course Name Design and Modeling of MEMS 573

Semester Güz

Course Type Compulsory

Theory 3

Credit 3

ECTS 10

Course Description

Essential of microfabrication and MEMS foundry procesess. MEMS layout design.Lumped modeling and modeling in multiple energy domains. Linear and nonlinear coupling. Dissipative procesess. Macromodeling techniques. Finite element analysis of MEMS Case Studies.